Mini cartridge for gas cabinet vent lines
Before a fresh gas cylinder is put on-line within a gas supply cabinet, a small, but nevertheless significant amount of process gas remaining from the previous cylinder must first be removed.
The residual gas is likely to be a highly concentrated toxic, pyrophoric, or corrosive gas, resulting in a potential safety hazard.
The CLEANVENT cartridge was developed for installation within gas cabinets or supply panels for speciality gases. The cartridge is mounted directly within the gas supply cabinet, typically up-stream of the Venturi vacuum generator.
Purge gases are evacuated through the CLEANSORB absorber bed of the cartridge and are purified from hazardous gas concentrations. Cartridge types are available for a broad range of semiconductor process gases
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